Kinetic Model of an RF Discharge in Oxygen

Abstract

A kinetic model to assist in understanding the complicated physical and chemical processes occurring in an RF oxygen plasma has been developed. Ten fundamental reaction equations are considered to account for the production and loss processes of the main reactive species. The rate coefficients for the electron impact processes used in the balance equations are calculated using the measured electron energy distribution function. The calculated concentrations of O and O₂ are compared with experimentally measured values for a range of pressure and RF power. The reasonable agreement between results of the model calculation and the experimental data confirms the validity of the model used.