Ion Scattering Spectrometry

Abstract

The scattering of ions from the surface and near surface region is a common method of analyzing solid surfaces. The basic principles of ion scattering spectrometry are reviewed with emphasis on those factors which affect the interpretation of the scattering measurements. In particular we emphasize the role of the interatomic potential and the neutralization factor involved in ion-surface scattering. Several aspects of ion scattering spectrometry are then outlined, including its application to studies of the composition and crystallographic structure of surfaces. Some factors of ion scattering spectrometry peculiar to surfaces are mentioned, e.g. the sequential 'double' collision event. The use of photon emission studies as a means of inferring something of the neutralization processes involved is briefly outlined, emphasizing the study of polarized emission from scattered ions at glancing incidence to the target surface.