
TY  - JOUR
A1  - Dai, X 
T1  - Kinetic Model of an RF Discharge in Oxygen
JF  - Australian Journal of Physics
JO  - Aust. J.  Phys.
Y1  - 1996
VL  - 49
IS  - 6
SP  - 1169
EP  - 1180
KW  - 
UR  - https://doi.org/10.1071/PH961169 
N2  - A kinetic model to assist in understanding the complicated physical and chemical processes occurring in an RF oxygen plasma has been developed. Ten fundamental reaction equations are considered to account for the production and loss processes of the main reactive species. The rate coefficients for the electron impact processes used in the balance equations are calculated using the measured electron energy distribution function. The calculated concentrations of O and O2 are compared with experimentally measured values for a range of pressure and RF power. The reasonable agreement between results of the model calculation and the experimental data confirms the validity of the model used. 
ER  -

