
TY  - JOUR
A1  - Wilhelm, HE 
T1  - Quantum-statistical Analysis of Low Energy Sputtering
JF  - Australian Journal of Physics
JO  - Aust. J.  Phys.
Y1  - 1985
VL  - 38
IS  - 2
SP  - 125
EP  - 134
KW  - 
UR  - https://doi.org/10.1071/PH850125 
N2  - Low energy surface sputtering of polycrystalline metals is explained theoretically by means of a three-body sputtering mechanism involving the impinging ion and two metal atoms. By means of quantum-statistical methods, a formula for the number S(E) of atoms sputtered on the average by an ion of energy E is derived from first principles. The theory agrees with experimental sputtering data in the low energy region above the threshold. As an application, mercury-metal atom scattering cross sections are determined by quantitative comparison of the theoretical and experimental S(E) values for sputtering mercury ions from various metals. 
ER  -

