
TY  - JOUR
A1  - Aizawa, Takao 
A1  - Tsunoda, Takafumi 
A1  - Sekine, Toru 
A1  - Kunimi, Takashi 
A1  - Ito, Shunichiro 
A1  - Kato, Ayato 
A1  - Matsuoka, Toshifumi 
T1  - Development of the high sensitivity MEMS accelerometer for oil and gas exploration
JF  - ASEG Extended Abstracts
JO  - ASEG Extended Abstracts
Y1  - 2013
VL  - 2013
IS  - 1
SP  - 1
EP  - 4
KW  - 
UR  - https://doi.org/10.1071/ASEG2013AB340 
N2  - Seismic reflection survey is the main technique for exploring the underground. While the position is not expected to change in the near future, the data quality in resolution and S/N ratio is always subject of improvement. The authors have developed the high resolution MEMS accelerometer for oil and natural gas exploration. In this research, the form of a MEMS element, size and electronic circuit were modified to enhance sensitivity of a prototype of MEMS to use in a MEMS accelerometer. The MEMS sensor made as an experiment by this research surpassed -130 dB/â??Hz which is the world highest ever by the performance evaluation test carried out. We are striving towards disseminating the developed MEMS sensors. 
ER  -

