Development of the high sensitivity MEMS accelerometer for oil and gas exploration

Abstract

Seismic reflection survey is the main technique for exploring the underground. While the position is not expected to change in the near future, the data quality in resolution and S/N ratio is always subject of improvement. The authors have developed the high resolution MEMS accelerometer for oil and natural gas exploration. In this research, the form of a MEMS element, size and electronic circuit were modified to enhance sensitivity of a prototype of MEMS to use in a MEMS accelerometer. The MEMS sensor made as an experiment by this research surpassed -130 dB/â??Hz which is the world highest ever by the performance evaluation test carried out. We are striving towards disseminating the developed MEMS sensors.