Quantum-statistical Analysis of Low Energy Sputtering

Abstract

Low energy surface sputtering of polycrystalline metals is explained theoretically by means of a three-body sputtering mechanism involving the impinging ion and two metal atoms. By means of quantum-statistical methods, a formula for the number S(E) of atoms sputtered on the average by an ion of energy E is derived from first principles. The theory agrees with experimental sputtering data in the low energy region above the threshold. As an application, mercury-metal atom scattering cross sections are determined by quantitative comparison of the theoretical and experimental S(E) values for sputtering mercury ions from various metals.