A Fast-response EBIC System
CJ Rossouw, FJ Maher and AA Panjkov
Australian Journal of Physics
36(4) 565 - 572
Published: 1983
Abstract
The application of the EBIC technique in the study of electrical activity of defects in semiconductors is discussed, with particular reference to instrumentation. A fast-response current amplifier, built in our Division, is shown to be more than adequate for most EBIC applications. Some examples of EBIC analysis are presented.https://doi.org/10.1071/PH830565
© CSIRO 1983