Citation
Sakurai Takeki , Kobayashi Shigeru , Ogura Jun , Inoue Yukio Hori Hirokazu (1995) Dissociation Processes of SiCl4 and Plasma Parameters measured by Transient Spectroscopy at the Beginning of a SiCl4?Helium dc Discharge. Australian Journal of Physics 48, 515-526.
https://doi.org/10.1071/PH950515
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