Cold Plasma Metallization of Supported Metal Salt Layers
J. M. Crowther A and J. P. S. Badyal A BA Department of Chemistry, Science Laboratories, Durham University, Durham DH1 3LE, UK.
B Corresponding author. Email: j.p.badyal@durham.ac.uk
Australian Journal of Chemistry 65(8) 1139-1144 https://doi.org/10.1071/CH12163
Submitted: 22 March 2012 Accepted: 12 June 2012 Published: 6 August 2012
Abstract
Non-isothermal H2 plasma reduction of supported silver nitrate or palladium acetate leads to the formation of metallic films. This method benefits from being able to coat heat-sensitive substrates, as well as complex shaped objects, without the requirement for large amounts of solvent or complex chemical synthesis. X-ray diffraction, X-ray photoelectron spectroscopy, attenuated total reflectance-FTIR spectroscopy, and optical microscopy have been used to follow the various stages of this low temperature metallization technique.
References
[1] Handbook of Deposition Technologies for Films and Coatings (Ed. R. F. Bunshah) 1994, Chapter 1 (Noyes Publications, Park Ridge, New Jersey, 2nd Edition).[2] D. M. Brown, W. E. Engeler, M. Garfinkel, F. K. Heumann, J. Electrochem. Soc. 1967, 114, 730.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaF2sXksFygtrY%3D&md5=a089d3e07f5a3881d86fa8adb2079b6eCAS |
[3] P. Mercea, L. Muresan, V. Mecea, D. Silipas, I. Ursu, J. Membr. Sci. 1988, 35, 291.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL1cXhtlaqt7w%3D&md5=05fb57380170c8ab662d8e5e7ab2ed1aCAS |
[4] J. Mizsei, J. Harsanyi, Sens. Actuators 1983, 4, 397.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL2cXhs1Kjtb0%3D&md5=a31c9b93839cffb4e315d28768d13253CAS |
[5] J. Shu, B. P. A. Grandjean, A. Van Neste, S. Kaliaguine, Can. J. Chem. Eng. 1991, 69, 1036.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK3MXmtlGgsbw%3D&md5=526c932fa72446c3ead72ab5e089d404CAS |
[6] (a) E. Feurer, H. Suhr, Thin Solid Films 1988, 157, 81.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL1cXktFGnt7k%3D&md5=e1aee5ee04e9bb171d07724db971258cCAS |
(b) J. E. Gozum, D. M. Pollina, J. A. Jensen, G. S. Girolami, J. Am. Chem. Soc. 1988, 110, 2688.
| Crossref | GoogleScholarGoogle Scholar |
(c) Z. Yuan, N. H. Dryden, J. J. Vittal, R. J. Puddephatt, Chem. Mater. 1995, 7, 1696.
| Crossref | GoogleScholarGoogle Scholar |
[7] Ch. J. Raub, Platin. Met. Rev. 1982, 26, 158.
| 1:CAS:528:DyaL38Xmt1Ggu7c%3D&md5=09ef60dba7b746956ab40b113d195a0dCAS |
[8] H. Esrom, U. Kogelschatz, Appl. Surf. Sci. 1990, 46, 158.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK3MXhtFWlurg%3D&md5=ce882faf1e5ab83223ee5a54c5e31456CAS |
[9] (a) M. E. Gross, W. L. Brown, L. R. Harriott, K. D. Cummings, J. Linros, H. Funsten, J. Appl. Phys. 1989, 66, 1403.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL1MXlvF2ks7k%3D&md5=43b4d0c0e0cd5ccae9819d82a0b340a6CAS |
(b) T. J. Stark, T. M. Mayer, D. P. Griffis, P. E. Russell, J. Vac. Sci. Technol. B 1991, 9, 3475.
| Crossref | GoogleScholarGoogle Scholar |
[10] V. Jayaraman, Y. S. Lin, M. Pakala, R. Y. Lin, J. Membr. Sci. 1995, 99, 89.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK2MXjvVWjt7g%3D&md5=d3cc793a242ced23e7a9da25029b7fc3CAS |
[11] M. L. Chou, N. Manning, H. Chen, Thin Solid Films 1992, 213, 64.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK38Xlt1Snsb8%3D&md5=c9c67c2798499f9baa78efbbd012cbc4CAS |
[12] (a) S. E. Roark, K. L. Rowlen, Anal. Chem. 1994, 66, 261.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK2cXjvFWitA%3D%3D&md5=559f92f5f46cefc66bb7a2a614fc6032CAS |
(b) J.-D. Grunwaldt, F. Atamny, U. Göbel, A. Baiker, Appl. Surf. Sci. 1996, 99, 353.
| Crossref | GoogleScholarGoogle Scholar |
[13] C.-J. Huang, C.-C. Yen, T.-C. Chang, J. Appl. Polym. Sci. 1991, 42, 2237.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK3MXitlaqu74%3D&md5=7fd75685111caa4ed4bf29b7116aa09dCAS |
[14] (a) R. E. Southward, D. S. Thompson, D. W. Thompson, M. L. Caplan, A. K. St. Clair, Chem. Mater. 1995, 7, 2171.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK2MXovFChurY%3D&md5=261eeb634e77d36b10c63e0140d50f74CAS |
(b) R. E. Southward, D. W. Thompson, A. K. St. Clair, Chem. Mater. 1997, 9, 501.
| Crossref | GoogleScholarGoogle Scholar |
[15] C.-C. Yen, T.-C. Chang, H. Kakinoki, J. Appl. Polym. Sci. 1990, 40, 53.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK3cXksVajtbg%3D&md5=8b11ee04cff5310bc826e10cba3b825eCAS |
[16] S. J. Haswell, Practical Guide to Chemometrics 1992, p. 201 (Dekker, New York).
[17] M. P. Seah, M. T. Anthony, Surf. Interface Anal. 1984, 6, 230.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL2MXhs1KisQ%3D%3D&md5=97491a207a72b37198f6341755f30bbeCAS |
[18] Practical Surface Analysis Volume 2 – Ion and Neutral Spectroscopy (Eds. D. Briggs, M. P. Seah) 1992, Appendix 4 (John Wiley and Sons Ltd., Great Britain, 2nd Edition).
[19] P. W. Atkins, in Physical Chemistry 1990, Chapter 25 (Oxford University Press, Great Britain, 4th Edition).
[20] H. E. Swanson, N. T. Gilfrich, G. M. Ugrinic, Circulation 1955, 539, 59.
[21] H. E. Swanson, E. Tatge, Circulation 1953, 539, 25.
[22] M. E. Gross, W. L. Brown, L. R. Harriott, K. D. Cummings, J. Linnros, H. Funsten, J. Appl. Phys. 1989, 66, 1403.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaL1MXlvF2ks7k%3D&md5=43b4d0c0e0cd5ccae9819d82a0b340a6CAS |
[23] H. E. Swanson, E. Tatge, Circulation 1953, 539, 21.
[24] G. L. Selman, P. J. Ellison, A. S. Darling, Platin. Met. Rev. 1970, 14, 14.
| 1:CAS:528:DyaE3cXot1ajtw%3D%3D&md5=0de4a6c4cb365f727d9eb853e5950b14CAS |
[25] J. E. Worsham, M. K. Wilkinson, C. G. Shull, J. Phys. Chem. Solids 1957, 3, 303.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaG1cXltl2msA%3D%3D&md5=2e0206da863e4c85262516b7e8297f6dCAS |
[26] M. J. Scaini, G. M. Bancroft, J. W. Lorimer, L. M. Maddox, Geochim. Cosmochim. Acta 1995, 59, 2733.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK2MXmvFWrtbw%3D&md5=e8357a6950ec30af7b477e0370d806b5CAS |
[27] G. H. Sigel, in Treatise on Materials Science and Technology Volume 12 (Eds. M. Tomozawa, R. H. Doremus) 1977, p. 67 (Academic Press Inc., London).
[28] F. A. Miller, C. H. Wilkins, Anal. Chem. 1952, 24, 1253.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaG38XmsFeqtw%3D%3D&md5=d2f17b6b7e67f6f8f05c5e911f686de0CAS |
[29] K. Nakamoto, in Infrared and Raman Spectra of Inorganic and Coordination Compounds 1978, Chapter III (John Wiley & Sons Inc., USA, 3rd Edition).
[30] Handbook of Physics and Chemistry (Ed. R. C. Weast) 1982, Section F-133 (CRC Press Inc., 63rd Edition, Florida, USA).
[31] F. K. McTaggart, in Plasma Chemistry in Electrical Discharges 1967, Chapter 6 (Elsevier Publishing Company, Amsterdam).
[32] H. Turcicova, H. Arend, O. Jarolimek, Solid State Commun. 1995, 93, 979.
| Crossref | GoogleScholarGoogle Scholar |
[33] F. K. McTaggart, Aust. J. Chem. 1965, 18, 937.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaF2MXkvFGgtr0%3D&md5=2dfe42f11361fb4646cab98c75af441eCAS |
[34] F. K. McTaggart, Aust. J. Chem. 1965, 18, 949.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaF2MXkvFGgtro%3D&md5=b4b94fd671a9c9d4b2f02ebd52a700b6CAS |
[35] F. K. McTaggart, A. G. Turnbull, Aust. J. Chem. 1964, 17, 727.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaF2cXksFaqsLo%3D&md5=5ccf7c763b8c77efa47462e496e3edf8CAS |
[36] D. Wu, R. A. Outlaw, R. L. Ash, J. Vac. Sci. Technol. A 1996, 14, 408.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK28XhvVGrtrs%3D&md5=e764ce79714c93c87cfc8096863bbe67CAS |
[37] J. M. Crowther, J. P. S. Badyal, Adv. Mater. 1998, 10, 407.
| Crossref | GoogleScholarGoogle Scholar | 1:CAS:528:DyaK1cXis1Gqtrg%3D&md5=9d566a6d158a0c32f2d7e02b38f6b0aaCAS |